Chemical Analysis

Chemical analysis and testing is a technology that utilizes chemical principles, methodologies and instruments to analyze the composition, structure and content of substances and provide data support. Its core objectives fall into qualitative and quantitative analysis. Qualitative analysis identifies components, such as heavy metal detection in water samples; quantitative analysis measures substance concentrations, for instance determining Vitamin C concentration in food.

It is mainly divided into classical chemical analysis and modern instrumental analysis. The former relies on chemical properties and adopts gravimetry, titration and other methods featuring low costs and suitability for macro analysis yet low efficiency. The latter makes use of physical or physicochemical properties together with instruments including chromatography and spectrometry, delivering high sensitivity and efficiency for trace analysis, though equipment investment is relatively high.

A typical workflow consists of sample collection and preparation (ensuring representativeness and sample pretreatment), method selection and validation (selecting appropriate approaches and verifying accuracy), instrument operation and data acquisition (standardized operation and data recording), data processing and result reporting (data conversion and marking of critical information).

It enjoys extensive applications: detection of residues and additives in the food industry; analysis of water, air and soil in environmental sectors; testing of pharmaceutical ingredients and impurities in medicine. It is also applied in materials science, industrial production, public security and other fields, acting as a vital technical support for modern society.

Against the growing demand for monitoring fundamental material properties in semiconductor chemistry and electronic wet chemistry, the HuaWayDa Chemical Analysis Laboratory is equipped with multiple advanced testing instruments to establish core capabilities covering trace metal testing, trace ion concentration measurement and comprehensive chemical laboratory testing. It has won high recognition from customers with accurate and reliable services.

For trace metal analysis of semiconductor process chemicals, the laboratory can perform ppt-level (10⁻¹² order of magnitude) trace metal analysis for ultra-pure water (UPW) and key chemicals including HF, HCl, HNO₃, H₂SO₄, H₃PO₄, NH₄OH, BOE, SC1, SC2, DEV, H₂O₂, IPA and NMP. For surface metal contamination detection on wafers, the sensitivity reaches 5E8 atoms/cm². A comprehensive spectrum of metals can be analyzed, including Li, Na, Mg, Al, K, Cr, Mn, Fe, Ni, Pb, Co, Ca, Ga, As, Cu, Zn, Ag, Ba, Tl, B, Bi, Cd, In, Sr, W, Si, Ti and other elements, satisfying the requirements for metal impurity control throughout the entire semiconductor manufacturing process.

Furthermore, the laboratory provides distinctive technical services such as isotope separation, delivering all-round technical support for high-end material R&D and quality control within the semiconductor industry.

Testing Capability

Category

Test Object

Test Items

Equipment Used

Detection Limit Range

Silicon, Silicon Wafers & Related Materials

Silicon Wafers

Surface/Bulk Metallic Impurities (B, P, As, K, Na, Ca,
                   Mg, Al, Cr, Fe, Ni, Cu, Zn and more than 67 elements)

ICP-MS

1E9 atoms/cm²

Bulk Silicon (Electronic Grade, PV Grade), Silicon Nitride, Quartz Stone/Sand

Surface/Bulk Metallic Impurities (Fe, Cr, Ni, Cu, Zn, Na and more than 67 elements)

ICP-MS

0.1~0.5 ppbw (bulk matrix)
                   10~50 pptw (surface)

Cleanroom Environment & Materials

Graphite, PE Packaging Materials, Gloves, PE Bags, PFA Materials

Surface/Bulk Metallic Impurities (K, Na, Ca, Mg, Al, Cr, Fe, Ni, Cu, Zn and 67 elements in total)

ICP-MS, ICP-OES

ppt ~ ppb

Cleanroom Air

Air Particle Count (0.1~0.5 μm)

Air Particle Counter

pcs

Metallic Impurities (K, Na, Ca, Mg, Al, Cr, Fe, Ni, Cu, Zn and 67 elements in total)

ICP-MS

ppb

Anions & Cations (F⁻, Cl⁻, NO₃⁻, SO₄²⁻, PO₄³⁻, NH₄⁺, etc.)

Ion Chromatograph

0.02 ng/L

Impurities in Cleanroom Air (TVOC, etc.)

Thermal Desorption-GC-MS

/

High-Purity Gases

Ar₂, H₂, N₂, Ethylene and other specialty gases

Metallic Impurities (K, Na, Ca, Mg, Al, Cr, Fe, Ni, Cu, Zn and 67 elements in total)

ICP-MS

ppb

High-Purity Chemicals

HNO₃, HF, H₂SO₄, HCl, H₂O₂, NH₄OH, H₃PO₄, BOE, SC1, SC2, DEV, NMP, IPA, etc.

Metallic Impurities (K, Na, Ca, Mg, Al, Cr, Fe, Ni, Cu, Zn and 67 elements in total)

ICP-MS

1~10 pptw

Particulates (0.1~0.5 μm)

Liquid Particle Counter

ea/ml

Anions & Cations (F⁻, Cl⁻, NO₃⁻, SO₄²⁻, PO₄³⁻, NH₄⁺, etc.)

Ion Chromatograph

/

Ultra-Pure Water

UPW

Metallic Impurities (K, Na, Ca, Mg, Al, Cr, Fe, Ni, Cu, Zn and 67 elements in total)

ICP-MS

1~10 pptw

Anions & Cations (F⁻, Cl⁻, NO₃⁻, SO₄²⁻, PO₄³⁻, NH₄⁺, etc.)

Ion Chromatograph

20 ppt

Particulates (0.1~0.5 μm)

Liquid Particle Counter

ea/ml



Relevant Standards
  • Standards for Chemical Composition Analysis

  • Spectroscopic Analysis: Standards for spark optical emission spectrometry include GB/T 11170, ASTM E1086 (stainless steel), etc.; standards for inductively coupled plasma optical emission spectrometry include GB/T 20125 (carbon steel and low-alloy steel), SN/T 2718 (stainless steel), etc.

  • Chemical Titration Method: The GB/T 223 series national standards specify chemical analysis methods for iron, steel and alloys, adopting chemical titration and other techniques to determine the contents of various elements in iron and steel.

  • X-ray Fluorescence Spectrometry: GB/T 16597-2019 is the general standard for X-ray fluorescence spectrometric analysis, which specifies performance requirements and analytical methods for X-ray fluorescence spectrometers.


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